Microsystem design / Stephen D. Senturia, Massachusetts Institute of Technology.
Material type:
TextLanguage: English Boston : Kluwer Academic Publishers, 2001©2001 Description: xxvi, 689 pages : illustrations ; 24 cmContent type: text Media type: unmediated Carrier type: volumeISBN: 9781475774580 (paperback)Subject(s): Microelectromechanical systems -- Design and construction | System design | MicroelectronicsLOC classification: TK7875 .S46 2001
| Item type | Current library | Shelving location | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|---|
| Books | MEF Üniversitesi Kütüphanesi | Genel Koleksiyon | TK 7875 .S46 2001 (Browse shelf (Opens below)) | Available | 0002756 |
Includes bibliographical references (pages [665]-676) and index.
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