MEF Üniversitesi Kütüphanesi catalog

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Senturia, Stephen D., 1940-,

Microsystem design / Stephen D. Senturia, Massachusetts Institute of Technology. - xxvi, 689 pages : illustrations ; 24 cm.

Includes bibliographical references (pages [665]-676) and index.

ISBN: 9781475774580

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction
System design
Microelectronics

LC Class. No.: TK7875 / .S46 2001

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